Exhaust abatement

Plasma Abatement Unit

Used where other methods are not suitable, typically for fluorinated gases. High temperature from heated electrodes decomposes the gas, which is then cooled to meet temperature and emission requirements.

Industries: Semiconductor · Solar PV · LCD panel
Source: Hankoom website product page

Key points

For fluorinated gases
High-temperature decomposition, then cooling

Configured per project
Certificate scope confirmed by sales
Draft datasheet available

Use and conditions

Compiled from our website and product documents; final content follows technical review.

Treatment of harmful gases in process exhaust
Adsorption, wet, burn, heated or plasma method chosen by gas type

Limitations

The method is selected by gas type and flow
Emission limits follow local regulations and project design

Specifications Pending review

Target gases	NF₃, CF₄, SF₆
Method	Plasma thermal decomposition

Values come from our website and product documents and have not been technically reviewed. Do not use them for selection or engineering.

Supply scope and options

Standard supply

Equipment
Operation manual

Options

Treatment method
Capacity

To be confirmed separately

Emission standards and testing
Site exhaust and ducting

Documents and FAQ

Download draft datasheetHANKOOM_plasma_datasheet-draft.txt · No email required. The draft only contains what this page shows and has not been technically reviewed.

Download

How do I get a quote?

Add equipment to your inquiry list or describe your need. After you submit, a salesperson confirms the technical conditions and replies.

Can equipment be customised for a project?

Yes. Branches, panel size, control mode, pumps and tank volume are set per project and confirmed item by item with our engineering sales.

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No. Browsing, downloading public documents, asking the AI and submitting an inquiry need no registration.