Products
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GC Gas Cylinder Cabinet
Gas supply cabinet designed for flammable, corrosive and toxic electronic specialty gases, delivering them safely and steadily.

Specialty Gas Cabinet
Specialty gas delivery system for semiconductor, LCD, microelectronics and solar production, mostly for toxic, flammable, corrosive and rare gases.

BSGS Bulk Specialty Gas Supply System
High-flow specialty gas supply equipment that delivers very large flows of electronic specialty gas safely, steadily and without interruption.


VMB Valve Manifold Box
Distribution box that splits specialty gas from the main line into branches, which feed process tools safely through secondary piping.

VDB Valve Distribution Box
First-stage distribution for bulk specialty gas systems, splitting the bulk main line into several sub-mains for high-flow supply.

LDS Liquid Precursor Delivery Cabinet
Designed for liquid precursors such as TMA and TEOS, supplying downstream processes safely, steadily and continuously.