Shanghai Hankoom Technology Co., Ltd.Downloads
Draft datasheets can be downloaded without an email. Final datasheets will be published after technical review.
Specialty gas supply
GC Gas Cylinder CabinetHANKOOM_gc_datasheet-draft.txtDownload
Specialty Gas CabinetHANKOOM_sgc_datasheet-draft.txtDownload
BSGS Bulk Specialty Gas Supply SystemHANKOOM_bsgs_datasheet-draft.txtDownload
GR Gas Cylinder RackHANKOOM_gr_datasheet-draft.txtDownload
VMB Valve Manifold BoxHANKOOM_vmb_datasheet-draft.txtDownload
VDB Valve Distribution BoxHANKOOM_vdb_datasheet-draft.txtDownload
LDS Liquid Precursor Delivery CabinetHANKOOM_lds_datasheet-draft.txtDownload
Chemical supply
Automatic Chemical Dispense Module (Acid/Alkali) 1000 LHANKOOM_cdm1000_datasheet-draft.txtDownload
Automatic Chemical Dispense Module (Acid/Alkali) 200 LHANKOOM_cdm200_datasheet-draft.txtDownload
Automatic Chemical Filling UnitHANKOOM_fill_datasheet-draft.txtDownload
Chemical Delivery Module (Organic)HANKOOM_cdmorg_datasheet-draft.txtDownload
Chemical Valve Manifold Box (Organic)HANKOOM_vmborg_datasheet-draft.txtDownload
Chemical Valve Manifold Box (Acid/Alkali)HANKOOM_vmbacid_datasheet-draft.txtDownload
Exhaust abatement
Dry Adsorption Abatement UnitHANKOOM_adsorb_datasheet-draft.txtDownload
Wet Scrubber Abatement UnitHANKOOM_wet_datasheet-draft.txtDownload
Burn-Wet Abatement UnitHANKOOM_burnwet_datasheet-draft.txtDownload
Heated Wet Abatement UnitHANKOOM_heatwet_datasheet-draft.txtDownload
Electric-Heated Wet Abatement UnitHANKOOM_eheatwet_datasheet-draft.txtDownload
Plasma Abatement UnitHANKOOM_plasma_datasheet-draft.txtDownload
Nitrogen generators
- PTA High-Purity Nitrogen GeneratorHANKOOM_pta_datasheet-draft.txtDownload
Gas purifiers
- Point-of-Use Gas Purifier (9N / 7N)HANKOOM_pou_datasheet-draft.txtDownload
- In-Situ Regenerable Purification System (9N / 7N)HANKOOM_insitu_datasheet-draft.txtDownload
- In-Situ Purification System with CH₄ RemovalHANKOOM_ch4_datasheet-draft.txtDownload