Shanghai Hankoom Technology Co., Ltd.Products
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GC Gas Cylinder Cabinet
Gas supply cabinet designed for flammable, corrosive and toxic electronic specialty gases, delivering them safely and steadily.
Specialty Gas Cabinet
Specialty gas delivery system for semiconductor, LCD, microelectronics and solar production, mostly for toxic, flammable, corrosive and rare gases.
BSGS Bulk Specialty Gas Supply System
High-flow specialty gas supply equipment that delivers very large flows of electronic specialty gas safely, steadily and without interruption.
VMB Valve Manifold Box
Distribution box that splits specialty gas from the main line into branches, which feed process tools safely through secondary piping.
VDB Valve Distribution Box
First-stage distribution for bulk specialty gas systems, splitting the bulk main line into several sub-mains for high-flow supply.
LDS Liquid Precursor Delivery Cabinet
Designed for liquid precursors such as TMA and TEOS, supplying downstream processes safely, steadily and continuously.
Automatic Chemical Dispense Module (Acid/Alkali) 1000 L
Automatic dispense system for acids and alkalis in semiconductor, solar, LCD panel and optical fibre production.
Automatic Chemical Dispense Module (Acid/Alkali) 200 L
Automatic dispense system for acids and alkalis in semiconductor, solar, LCD panel and optical fibre production.
Automatic Chemical Filling Unit
Automatic chemical filling equipment for semiconductor, solar, LCD panel and optical fibre production.
Chemical Delivery Module (Organic)
Automatic dispense system for organic chemicals in semiconductor, solar, LCD panel and optical fibre production.
Chemical Valve Manifold Box (Organic)
Distribution box for organic chemicals in IC, LED, TFT and optical fibre industries.
Chemical Valve Manifold Box (Acid/Alkali)
Distribution box for acids and alkalis in semiconductor, solar, LCD panel and optical fibre production.
Dry Adsorption Abatement Unit
Uses van der Waals adsorption to capture harmful gases and release only non-toxic gas to atmosphere.
Wet Scrubber Abatement Unit
Treats gases that are flammable or easily decomposed and whose products dissolve readily in water.
Heated Wet Abatement Unit
Treats gases that are flammable or easily decomposed and whose products dissolve readily in water.
Electric-Heated Wet Abatement Unit
Electrically heated decomposition followed by wet scrubbing, for gases whose products dissolve readily in water.
Plasma Abatement Unit
Used where other methods are not suitable, typically for fluorinated gases. High temperature from heated electrodes decomposes the gas, which is then cooled to meet temperature and emission requirements.
PTA High-Purity Nitrogen Generator
Two-stage PSA + TSA process: compressed air goes in and 5N–7N nitrogen comes out of one unit, replacing cylinders, dewars and liquid nitrogen tanks.
Point-of-Use Gas Purifier (9N / 7N)
Room-temperature catalyst technology removes H₂O, O₂, CO, CO₂, H₂, NMHC and other impurities from 5N process gas to below 1 ppb by chemical reaction and physical adsorption.
In-Situ Regenerable Purification System (9N / 7N)
Purification system for high-flow process gas; the adsorbent regenerates automatically on site, with no return to the factory.
In-Situ Purification System with CH₄ Removal
In-situ regenerable purification that also removes CH₄, for nitrogen and argon.
